• PRODUCT
  • IR
  • CUSTOMER CENTER

  • RTP(Rapid Thermal Processing)
  • RHP200/150 Series

  • RHP200/150 Series
  • RHP is the rapid thermal processing system which can be used for leading edge processes for memory or logic devices.

     - Temperature range : 400 ~ 1350℃
     - Temperature repeatability : ±1℃ (@ bare wafer)
     - Temperature ramp up rate: 250℃/s (@ ATM process)
     - Temperature cool down rate: 100℃/s
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