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  • CTI-CRYOGENICS® CRYOPUMP SYSTEMS
  • On-Board IS Cryopump Systems

  • On-Board IS Cryopump Systems
  • Brooks CTI-Cryogenics On-Board IS cryopump systems leverage new high-efficiency cryogenics technology providing unparalleled vacuum performance and energy efficiency.
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  • On-Board Cryopumps

  • On-Board Cryopumps
  • The CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation are the world standard for reliability and performance. Delivering superior uptime, On-Board cryopumps, with fully integrated controls and supporting peripherals, deliver superior uptime to increase overall tool productivity
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  • On-Board Waterpumps

  • On-Board Waterpumps
  • Brooks CTI-Cryogenics On-Board Waterpumps are high- performance vacuum pumps that increase water vapor pumping speed to provide a 50% to 75% reduction in time to base pressure as well as high yields through reduced vapor presence and lower contamination
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  • Cryo-Torr Cryopumps

  • Cryo-Torr Cryopumps
  • Brooks CTI-Cryogenics Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. With their low operating costs and fast, easy maintenance, these cryopumps deliver high reliability backed by responsive service you can count on.
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  • Compressors

  • Compressors
  • Brooks CTI-Cryogenics offers a choice of compressors designed to provide optimum performance with On-Board Cryopumps, Cryo-Torr Cryopumps and/or On-Board Waterpumps. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications for all Brooks vacuum pumps.
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  • Cryodyne Refrigerators

  • Cryodyne Refrigerators
  • The Brooks CTI-Cryogenics Cryodyne Refrigeration Systems are a family of two stage, closed-cycle helium refrigeration systems, based on the Gifford-McMahon thermodynamic cycle, that offer usable heat lift from <10K to >80K for a variety of commercial and research applications.
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