- PERFREZ Series
"PRFREZ O-rings and parts are specially designed and manufactured to withstand virtually any process condition.
Besides providing superior chemical resistance and thermal stability, PERFREZ parts, designed specifically for semiconductor applications, offer contamination in reactive plasmas and cleaning gases with improved vacuum-sealing performance and lower outgassing. In addition, PERFREZ parts are manufactured under cleanroom conditions and specially cleaned with de-ionized water and double packaged in Class 100 workstations. PERFREZ components provide long-term reliability in plasma, gas deposition, thermal and ""wet"" processing applications, such as: HDPCVD, PECVD, LPCVD, RTP, etching, ashing, diffusion, lamp annealing and wet etching."
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