- Vacuum Environment Wafer Handling Robot (Semi)

- Vacuum Environment Wafer Handling Robot (Semi) - SR8608
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•End-Effectors for wafers up to ¥Õ300mm
•Dual arm version and double plate End-Effector ensure max throughput.
•Excellent straight line accuracy
•AC servo motors with absolute encoders
•Commonly used SC5000 robot controller
•Smaller radius of gyration with Boomerang arm application
- E-Mail : [Robot@globalzeus.com]
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Download :
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- ATM Robot (Semi)
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SR8250
Features
• End-Effectors for wafers up to ¥Õ300mm
• Dual arm version and double plate End-Effector ensure max throughput.
• Excellent straight line accuracy
• AC servo motors with absolute encoders for easy maintenance
• The enhanced safety high speed/performance commonly used SC5000 robot controller
• Smaller radius of gyration with Boomerang arm application
- E-Mail : [Robot@globalzeus.com]
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Download :
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