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  • Vacuum Environment Wafer Handling Robot (Semi)

  • Vacuum Environment Wafer Handling Robot (Semi) - SR8608
  • •End-Effectors for wafers up to Φ300mm
    •Dual arm version and double plate End-Effector ensure max throughput.
    •Excellent straight line accuracy
    •AC servo motors with absolute encoders
    •Commonly used SC5000 robot controller
    •Smaller radius of gyration with Boomerang arm application
  • E-Mail : [Robot@globalzeus.com]
  • Download :                  
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  • ATM Robot (Semi)

  • ATM Robot (Semi)
  • SR8250
    Features
    • End-Effectors for wafers up to Φ300mm
    • Dual arm version and double plate End-Effector ensure max throughput.
    • Excellent straight line accuracy
    • AC servo motors with absolute encoders for easy maintenance
    • The enhanced safety high speed/performance commonly used SC5000 robot controller
    • Smaller radius of gyration with Boomerang arm application
  • E-Mail : [Robot@globalzeus.com]
  • Download :                  
  •  
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