• PRODUCT
  • IR
  • CUSTOMER CENTER

  • LCD(OLED)
  • Vacuum Environment Wafer Handling Robot (FPD)

  • Vacuum Environment Wafer Handling Robot (FPD)
  • Features
    • Few outgoing gas hands making it light
    • Performance is steady by making the joint Unit secured
    • Can be applied to 3xLL by Longer Z stroke
    • Controller is small and light and maintenance is easy
    • An original cooling system corresponds to a high temperature environment
    • Easy separation of Runit & Manipulator makes maintenance & installation simple.
    • Arm transportation that uses high accuracy parts and high Bullitt belts
    • High straight advancement is secured by assuming Runit to be a linear drive
  • E-Mail : [Robot@globalzeus.com]
  • Download :                  
  •  
  • ATM Robot (FPD)

  • SR99 series
  • Features
    • Modular structure arms enable flexible sizes for Gen 6 to Gen 10
    •Achieved light weight and high speed maintaining stiffness of each part
    •Synchronized motion of upper and lower arms (enabling reduced Takt time by handling two substrates simultaneously.)
    •Sankyo original alignment mechanism (Sankyo patent) reduces alignment time
    •With additional S-axis, alignment is available in all directions (SR99H)
    •For Gen 11, customer restoration time is reduced by using special Z-axis structures.
    •Energy saving model with lower power consumption
  • E-Mail : [Robot@globalzeus.com]
  • Download :                  
  •  
LOGO JET 3Z Sitemap About Privacy Recruit