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PRODUCTS
ZEUS Business Divisions
ZEUS provides Total Solutions tailored to diverse customer needs in the semiconductor, display, robot, and materials & components sectors.
- Semiconductor
Providing Single and Batch Type Wafer cleaning systems, front-end (Clean, Etch, Strip, RTP) and advanced packaging equipment, plus semiconductor chemicals and electronic materials.
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- Display
Developing and manufacturing thermal processing equipment, including HPCP and ovens, while enhancing production efficiency through factory automation systems.
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- Robot
Offering a wide range of industrial robots based on proprietary Joint Module technology, along with turnkey automation equipment and production lines.
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- Materials & Components
Supplying high-purity chemical products, analyzers, and components used in semiconductors, displays, and MEMS, focusing on quality and technological development.
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Starting with single equipment manufacturing in 2010,
ZEUS localized batch equipment in 2022.
Today, ZEUS supplies semiconductor cleaning equipment covering front-end,
advanced packaging, and advanced packaging processes.
1981
Expansion Into Semiconductor Euipment & Components Business
300mm Batch
Wafer wet processing
2000
Establishment Of JET Co., Ltd.
Following Acquisition of SES Semiconductor Equipment Division (2009)
Wet Cleaning Process
300mm Batch / Single System
Started manufacturing and delivery
300mm Single Wafer Wet Processing
Localized technology (8CHB)
2010
Expansion Of Process Line-Up
Fab Processes : HTS(High Temperature Sulfuric),
3HF, Poly, LAL500, FPM, O3HF, etc.
PKG : Flux Clean, etc.
Transferred listing from TPM to JPX in 2023
300mm Single Wafer
Wet Processing (12CHB)
2020
Entry Into Advanced Packaging Process
Cleaner, Etcher, Stripper
Entered RTP processes
High performance heater manufacturing
Rapid Thermal
Processing System
ZEUS semiconductor equipment, proven across numerous production sites,
delivers fast and reliable responses to customer needs.
Wide Process Coverage
FEOL / BEOL / PKG
Total Solutions for Wet Etch
and Clean
Proven in Mass Production
R&D/simulation verification capabilities
based on Single / Batch
200mm / 300mm /
Adv. PKG.
Customized equipment
LAB / OSAT / IDM
1CHB-12CHB
Customized equipment manufacturing
World wide +1,400
Systems Sold
Built a global value chain through proven performance
Rapid Thermal
Processing [RTP]
Core RTP technology for applications beyond semiconductors
Semiconductor Equipment Line-Up
-
ION12
300mm Single Wafer Processor (12 Chamber)Contact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
APOLLON
300mm Single Wafer ProcessorContact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
VENUS
High Temperature 300mm Single Wafer ProcessorContact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
BW Series
300mm Batch Wafer ProcessorContact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
ATOM
400mm Single Wafer ProcessorContact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
RHP200/150 Series
Rapid thermal processing system used for leading edge processes for memory or logic devicesContact
- Tel
- +82-31-5187-1604
-
hschoi@globalzeus.com
mark@globalzeus.com (US)
-
ION-F
300mm Single Wafer CleanerContact
- Tel
- +82-31-5187-1257
- phh18mn@globalzeus.com