半导体 Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing) 显示器 Thermal Process Solutions 机器人 ZEUS ROBOT Display 材料与部件 Materials Analyzer Gauge MFC/PC Throttle Valve Controller Etc. ION12 300mm Single Wafer Processor (12 Chamber) APOLLON 300mm Single Wafer Processor VENUS High Temperature 300mm Single Wafer Processor BW Series 300mm Batch Wafer Processor ATOM 400mm Single Wafer Processor RHP200/150 Series Rapid thermal processing system used for leading edge processes for memory or logic devices HP/CP System Heat Treatment after Coating Equipment of TFT/CF Process Hot Air Oven System Thermal Process Solutions Pre Bake Oven Thermal Process Solutions 6 AXIS Articulated Robot. 'ZRA' The Zeus 6-axis articulated robot can be used even in confined spaces and, with its high degree of freedom, can be applied to a wide range of applications. Horizontal Articulated Robot ‘ZRB' The Zeus SCARA robot minimizes the use of belts and, with its high rigidity, enables precise control. Parallel Robot ‘ZRC’ The Zeus Delta robot has a lightweight design of 17 kg and boasts world-class repeatability. ATM Robot (Display) Vacuum Environment Wafer Handling Robot - SR99 series Vacuum Environment Wafer Handling Robot (Display) Vacuum Environment Wafer Handling Robot (Display)
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